Scheerschmidt, K., Belov, A. Y. and Conrad, D.
Institute of Physics Conference Series 161, pp 71-74 (1999) Molecular dynamics simulations using suitably fitted empirical potentials have been employed to describe atomic interactions at interfaces created by the macroscopic wafer bonding process. The comparison of the relaxed interface structures with experiments is possible using simulated images on the basis of the molecular dynamics structure models.
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