Inversion of dynamic scattering: Determination of local object-thickness and orientation

Scheerschmidt, K.

Institute of Physics Conference Series 161, pp 141-144 (1999)

Electron microscope structure analysis is usually based on the trial-and-error image matching between simulated contrasts and the experiment. A quantitative analysis requires the accurate knowledge of the local thickness and orientation of the samples, which is difficult to include pixelwise into the iterative procedure. In principle, electron holography allows the aberration-free reconstruction of the complex wave function in amplitudes and phases at the exit surface of a crystal. This implies the possibility of directly retrieving object information, the inverse solution can be gained by linearizing the scattering problem yielding an analytical solution of the dynamical theory with respect to the local sample thickness and orientation.

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