Investigation mechanisms of adhesion in MEMS by capacitance-voltage measurements with micromachined comb-structures.

Rump, A., Gösele, U., Fischer, F., Hein, P., Marek, J., Münzel, H., Pintèr, S. and Schöfthaler, M.

Proceedings of the 10th International Conference on Solid-State Senors and Actuators (Transducers'99) pp 500-503 (1999)