Epitaxial thin films of Bi4Ti3O12, SrBi2Ta2O9 and BaBi4Ti4O15 have been epitaxially deposited onto 3-inch substrates by large area pulsed laser deposition. The out-of-plane orientation of the layers is characterized by a FWHM of the rocking curve Delta omega in the range of 0.9 degrees to 2.1 degrees and their in-plane orientation by a FWHM of the phi-scan Delta phi ranging from 3 degrees to 4.5 degrees. The composition is uniform across the whole 3-inch wafer and a thickness uniformity in the range of 5 to 10% of the mean thickness has been achieved. The ferroelectric properties of the Bi-layered perovskite layers depend strongly on their microstructure and crystallographic orientation. The remnant polarization of SrBi2Ta2O9 films is ranging from P-r = 0.2 mu C/cm(2) for films having only c-oriented crystallites to P-r = 1 mu C/cm(2) for films containing a substantial fraction of crystallites with their c-axis in the plane of the film. [References: 21]