Publication $pid

Critical bonding energy required for hydrogen-implantation induced layer splitting

Huang, L.-J., Tong, Q.-Y. and Gösele, U.

Proceedings of the 5^th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications 99-35, pp 68-79 (Eds.) Hunt, C. E., Abe, T., Baumgart, H. and Gösele, U., The Electrochemical Society, (1999)