Wafer bonding of compound semiconductors using atomic hydrogen.

Akatsu, T., Plößl, A., Stenzel, H. and Gösele, U.

Proceedings of the 5th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications 99-35, pp 60-67 (Eds.) Hunt, C. E., Abe, T., Baumgart, H. and Gösele, U., The Electrochemical Society, (1999)