The resistivity of SrRuO3 thin films on (001) SrTiO3 substrates grown at different temperatures by pulsed laser deposition is correlated to the microstructure. Films grown at 775 degrees C are of an orthorhombic structure, contain very few defects, and exhibit a low resistivity of 150 mu Omega cm. Films grown at other temperatures contain a cubic phase and show higher resistivities. The defects present in the films, particularly twins and antiphase boundaries, are analyzed by high-resolution transmission electron microscopy, and their origin, as well as influence on film resistivity, is discussed. [References: 26]

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