Nanoscale Ferroelectric and Multiferroic Heterostructures
Abstract
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The fabrication of the epitaxial multiferroic heterostructures is done mainly by pulsed-laser deposition. A new PLD machine (MINERVA) with a high oxygen pressure (up to 500 mTorr O2) RHEED system for the in situ control of the epitaxial growth has been recently installed. Both the PLD processes and the RHEED are computer controlled, the vacuum chamber is equipped with a target carousel that has four target carriers, and a 1-inch substrate heater.
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MINERVA-PLD machine with high oxygen pressure RHEED system. |