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Silicon Photonics / Photovoltaics
Photonic Crystal: Slabs / Gas-Sensors
Abstract
People
Publications
Alumni
2006
Geppert, T. , S. L. Schweizer , U. Gösele , and R. B. Wehrspohn
Deep trench etching in macroporous silicon
.
Applied Physics A
84
(3) , p 237-242 (2006)
2005
Milenin, A. P. , C. Jamois , T. M. Geppert , U. Gösele , and R. B. Wehrspohn
SOI planar photonic crystal fabrication: Etching through SiO
2
/Si/SiO
2
layer systems using fluorocarbon plasmas
.
Microelectronic Engineering
81
(1) , p 15-21 (2005)
2004
Wehrspohn, R. B. , S. L. Schweizer , J. Schilling , T. M. Geppert , C. Jamois , R. Glatthaar , P. Hahn , A. Feisst , and A. Lambrecht
Application of photonic crystals for gas detection and sensing
.
In:
Photonic Crystals: Advances in Design, Fabrication and Characterization
, Ed. K. Busch , S. Lölkes , R. B. Wehrspohn , H. Föll p 238-246 Wiley-VCH, (2004)
2003
Hillebrand, R. , C. Jamois , J. Schilling , R. B. Wehrspohn , and W. Hergert
Computation of optical properties of Si-based photonic crystals with varying pore diameters
.
Physica Status Solidi B
240
, p 124-133 (2003)
2002
Jamois, C. , R. B. Wehrspohn , J. Schilling , F. Müller , R. Hillebrand , and W. Hergert
Silicon-based photonic crystal slabs: two concepts
.
IEEE Journal of Quantum Electronics
38
(7) , p 805-810 (2002)
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