Principle of electron beam evaporation
The electrons emitted by the filament are deflected by electric and magnetic fields towards the the evaporation material. In this way one avoids atoms and ions from the cathod hitting the ingot.
The silicon source is a 10KW electron beam evaporation source. The
other two electron beam evaporation sources work with a maximum power
of 4KW. All these sources are supplied with computer controled shutters
and water cooled shields. In order to reduce the necessary energy for
the evaporation we use liners in the shape of the crucible in the
copper crucibles.
Principle of electron beam evaporationThe electrons emitted by the filament are deflected by electric and magnetic fields towards the the evaporation material. In this way one avoids atoms and ions from the cathod hitting the ingot. |